公开(公告)号：US12094740B2

公开(公告)日：2024-09-17

申请号：US17212862

申请日：2021-03-25

申请人： Applied Materials, Inc.

发明人： Manoj A. Gajendra ,  Mahadev Joshi ,  Joseph Antony Jonathan ,  Jamie S. Leighton

IPC分类号： H01L21/67 ,  B08B3/02 ,  B08B5/02 ,  B08B13/00 ,  B24B37/013 ,  B24B37/34 ,  H01L21/02 ,  H01L21/306 ,  H01L21/66 ,  H01L21/687

CPC分类号： H01L21/67253 ,  B08B3/022 ,  B08B5/02 ,  B08B13/00 ,  B24B37/013 ,  B24B37/345 ,  H01L21/02057 ,  H01L21/30625 ,  H01L21/68707 ,  H01L22/12

摘要： A method and apparatus for polishing a substrate is disclosed herein. More specifically, the apparatus relates to an integrated CMP system for polishing substrates. The CMP system has a polishing station configured to polish substrates. A spin rinse dry (SRD) station configured to clean and dry the substrates. A metrology station configured to measure parameters of the substrates. A robot configured to move the substrate in to and out of the SRD station. And an effector rinse and dry (EERD) station configured to clean and dry an end effector of the robot.

公开(公告)号：US11241718B2

公开(公告)日：2022-02-08

申请号：US16386646

申请日：2019-04-17

申请人： Applied Materials, Inc.

发明人： Joseph Antony Jonathan ,  Kyle M. Hanson ,  Jason A. Rye ,  James E. Brown ,  Gregory J. Wilson ,  Eric J. Bergman ,  Tricia A. Youngbull ,  Timothy G. Stolt

IPC分类号： C25D21/08 ,  B08B1/00 ,  C25D17/00

摘要： Systems for cleaning electroplating system components may include a seal cleaning assembly incorporated with an electroplating system. The seal cleaning assembly may include an arm pivotable between a first position and a second position. The arm may be rotatable about a central axis of the arm. The seal cleaning assembly may include a cleaning head coupled with a distal portion of the arm. The cleaning head may include a bracket having a faceplate coupled with the arm, and a housing extending from the faceplate. The housing may define one or more arcuate channels extending through the housing to a front surface of the bracket. The cleaning head may also include a rotatable cartridge extending from the housing of the bracket. The cartridge may include a mount cylinder defining one or more apertures configured to deliver a cleaning solution to a pad coupled about the mount cylinder.