Invention Grant
- Patent Title: Field plate structure for high voltage device
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Application No.: US16952438Application Date: 2020-11-19
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Publication No.: US11335784B2Publication Date: 2022-05-17
- Inventor: Chia-Cheng Ho , Hui-Ting Lu , Pei-Lun Wang , Yu-Chang Jong , Jyun-Guan Jhou
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/66 ; H01L27/092 ; H01L29/78 ; H01L29/49 ; H01L21/28 ; H01L21/765 ; H01L21/8238

Abstract:
Various embodiments of the present disclosure are directed towards a method for forming an integrated chip. The method includes forming a source region and a drain region within a substrate. A drift region is formed within the substrate such that the drift region is disposed laterally between the source region and the drain region. A first gate structure is formed over the drift region. An inter-level dielectric (ILD) layer is formed over the first gate structure. The ILD layers is patterned to define a field plate opening. A first field plate layer, a second field plate layer, and a third field plate layer are formed within the field plate opening.
Public/Granted literature
- US20210074820A1 FIELD PLATE STRUCTURE FOR HIGH VOLTAGE DEVICE Public/Granted day:2021-03-11
Information query
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