Invention Grant
- Patent Title: Gas cushion apparatus and techniques for substrate coating
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Application No.: US16553909Application Date: 2019-08-28
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Publication No.: US11338319B2Publication Date: 2022-05-24
- Inventor: Alexander Sou-Kang Ko , Justin Mauck , Eliyahu Vronsky , Conor F. Madigan , Eugene Rabinovich , Nahid Harjee , Christopher Buchner , Gregory Lewis
- Applicant: KATEEVA, INC.
- Applicant Address: US CA Newark
- Assignee: KATEEVA, INC.
- Current Assignee: KATEEVA, INC.
- Current Assignee Address: US CA Newark
- Agency: Hauptman Ham LLP
- Main IPC: B05D3/06
- IPC: B05D3/06 ; B05D3/02 ; H01L51/00 ; B41J3/407 ; H01L21/67 ; H01L21/677 ; H01L21/683 ; H01L21/48 ; B05C15/00 ; B05C13/00 ; C23C14/00 ; H01L23/532 ; H05K3/00

Abstract:
A method of forming a material layer on a substrate comprises loading a substrate into a printing zone of a coating system using a substrate handler, printing an organic ink material on a substrate while the substrate is located in the printing zone, transferring the substrate from the printing zone to a treatment zone of the coating system, treating the organic ink material deposited on the substrate in the treatment zone to form a film layer on the substrate, and removing the substrate from the treatment zone using the substrate handler.
Public/Granted literature
- US20190388928A1 GAS CUSHION APPARATUS AND TECHNIQUES FOR SUBSTRATE COATING Public/Granted day:2019-12-26
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