Low particle gas enclosure systems and methods

    公开(公告)号:US10434804B2

    公开(公告)日:2019-10-08

    申请号:US14275637

    申请日:2014-05-12

    Applicant: Kateeva, Inc.

    Abstract: The present teachings relate to various embodiments of a gas enclosure system that can have various components comprising a particle control system that can provide a low-particle zone proximal to a substrate. Various components of a particle control system can include a gas circulation and filtration system, a low-particle-generating motion system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. In addition to maintaining substantially low levels for each species of various reactive species, including various reactive atmospheric gases, such as water vapor and oxygen, for various embodiments of a gas enclosure system that have a particle control system, an on-substrate particle specification can be readily met. Accordingly, processing of various substrates in an inert, low-particle gas environment according to systems and methods of the present teachings can have substantially lower manufacturing defects.

    Printing System Assemblies and Methods
    4.
    发明申请

    公开(公告)号:US20190270325A1

    公开(公告)日:2019-09-05

    申请号:US16416523

    申请日:2019-05-20

    Applicant: Kateeva, Inc.

    Abstract: The present teachings disclose various embodiments of a printing system for printing a substrate, in which the printing system can be housed in a gas enclosure, where the environment within the enclosure can be maintained as a controlled printing environment. A controlled environment of the present teachings can include control of the type of gas environment within the gas enclosure, the size and level particulate matter within the enclosure, control of the temperature within the enclosure and control of lighting. Various embodiments of a printing system of the present teachings can include a Y-axis motion system and a Z-axis moving plate that are configured to substantially decrease excess thermal load within the enclosure by, for example, eliminating or substantially minimizing the use of conventional electric motors.

    Printing system assemblies and methods
    8.
    发明授权
    Printing system assemblies and methods 有权
    打印系统组件和方法

    公开(公告)号:US09505245B2

    公开(公告)日:2016-11-29

    申请号:US14738785

    申请日:2015-06-12

    Applicant: Kateeva, Inc.

    Abstract: The present teachings disclose various embodiments of a printing system for printing a substrate, in which the printing system can be housed in a gas enclosure, where the environment within the enclosure can be maintained as a controlled printing environment. A controlled environment of the present teachings can include control of the type of gas environment within the gas enclosure, the size and level particulate matter within the enclosure, control of the temperature within the enclosure and control of lighting. Various embodiments of a printing system of the present teachings can include a Y-axis motion system and a Z-axis moving plate that are configured to substantially decrease excess thermal load within the enclosure by, for example, eliminating or substantially minimizing the use of conventional electric motors. Additionally, various embodiments of a Y-axis motion system of the present teachings can include a gripper motion control assembly of a Y-axis motion system configured to provide dynamic orientation of the rotation of a substrate about the theta-Z (θ-Z) axis during Y-axis travel to maintain a high degree of precision for substrate orientation parallel to the axis of travel.

    Abstract translation: 本教导公开了用于印刷衬底的打印系统的各种实施例,其中打印系统可以容纳在气体外壳中,其中外壳内的环境可以被保持为受控打印环境。 本教导的受控环境可以包括控制气体外壳内的气体环境类型,外壳内的尺寸和级别的颗粒物质,控制外壳内的温度和控制照明。 本教导的打印系统的各种实施例可以包括Y轴运动系统和Z轴移动板,其被配置为通过例如消除或基本上最小化常规的使用来大大减少外壳内的过多热负荷 电动机。 另外,本教导的Y轴运动系统的各种实施例可以包括Y轴运动系统的夹持器运动控制组件,其构造成提供围绕θ-Z(θ-Z)的衬底的旋转的动态取向, 在保持Y轴行进时的轴线保持高度的准确性,以便平行于行进轴线的基板定向。

    Gas Enclosure Systems and Methods Utilizing Multi-Zone Circulation and Filtration

    公开(公告)号:US20160236494A1

    公开(公告)日:2016-08-18

    申请号:US15046381

    申请日:2016-02-17

    Applicant: Kateeva, Inc.

    Abstract: The present teachings relate to various embodiments of a gas enclosure system that can have a particle control system that can include a multi-zone gas circulation and filtration system, a low-particle-generating X-axis linear bearing system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. Various components of a particle control system can include a tunnel circulation and filtration system that can be in flow communication with bridge circulation and filtration system. Various embodiments of a tunnel circulation and filtration system can provide cross-flow circulation and filtration of gas about a floatation table of a printing system. Various embodiments of a gas enclosure system can have a bridge circulation and filtration system that can provide circulation and filtration of gas about a printing system bridge and related apparatuses and devices. Accordingly, various embodiments of a gas circulation and filtration system as disclosed herein can effectively remove both airborne particulate matter, as well as particulate matter generated proximal to a substrate during a printing process. As such, various embodiments of a gas circulation and filtration system in conjunction with various embodiments of a gas purification system of the present teachings can provide for a controlled manufacturing environment resulting in a high-yield of OLED various devices.

    Apparatus and Techniques for Electronic Device Encapsulation
    10.
    发明申请
    Apparatus and Techniques for Electronic Device Encapsulation 有权
    电子设备封装的装置和技术

    公开(公告)号:US20150259786A1

    公开(公告)日:2015-09-17

    申请号:US14727602

    申请日:2015-06-01

    Applicant: Kateeva, Inc.

    Abstract: Apparatus and techniques for use in manufacturing a light emitting device, such as an organic light emitting diode (OLED) device can include using one or more modules having a controlled environment. The controlled environment can be maintained at a pressure at about atmospheric pressure or above atmospheric pressure. The modules can be arranged to provide various processing regions and to facilitate printing or otherwise depositing one or more patterned organic layers of an OLED device, such as an organic encapsulation layer (OEL) of an OLED device. In an example, uniform support for a substrate can be provided at least in part using a gas cushion, such as during one or more of a printing, holding, or curing operation comprising an OEL fabrication process. In another example, uniform support for the substrate can be provided using a distributed vacuum region, such as provided by a porous medium.

    Abstract translation: 用于制造发光器件(例如有机发光二极管(OLED))器件的装置和技术可以包括使用具有受控环境的一个或多个模块。 受控环境可以保持在大气压或大气压以上的压力。 这些模块可以被布置成提供各种处理区域并且便于打印或以其他方式沉积OLED器件(例如OLED器件的有机封装层(OEL))的一个或多个图案化的有机层。 在一个示例中,可以至少部分地使用气垫来提供对基底的均匀支撑,例如在包括OEL制造工艺的一个或多个印刷,保持或固化操作期间。 在另一个实例中,可以使用诸如由多孔介质提供的分布式真空区域来提供对基底的均匀支撑。

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