Invention Grant
- Patent Title: Transport apparatus
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Application No.: US16787184Application Date: 2020-02-11
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Publication No.: US11420337B2Publication Date: 2022-08-23
- Inventor: Ulysses Gilchrist , Jairo Terra Moura
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B25J15/00 ; H01L21/687 ; H01L21/677 ; B25J18/00

Abstract:
A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.
Public/Granted literature
- US20200180163A1 TRANSPORT APPARATUS Public/Granted day:2020-06-11
Information query
IPC分类: