Invention Grant
- Patent Title: Back grinding tape
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Application No.: US16964364Application Date: 2019-06-04
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Publication No.: US11424153B2Publication Date: 2022-08-23
- Inventor: Mi Seon Yoon , Sera Kim , Kwang Joo Lee , Bora Yeon , Sang Hwan Kim , Eun Yeong Kim
- Applicant: LG CHEM, LTD.
- Applicant Address: KR Seoul
- Assignee: LG CHEM, LTD.
- Current Assignee: LG CHEM, LTD.
- Current Assignee Address: KR Seoul
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: KR10-2018-0064315 20180604
- International Application: PCT/KR2019/006708 WO 20190604
- International Announcement: WO2019/235805 WO 20191212
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/304 ; C09J7/29 ; B32B27/36 ; B32B7/14

Abstract:
The present disclosure relates to a back grinding tape including a polymer resin layer including a urethane (meth)acrylate resin containing 10 to 40 wt % of a repeating unit derived from a (meth)acrylate monomer or oligomer having a glass transition temperature of 0° C. or higher, wherein the polymer resin layer has a glass transition temperature of −30° C. to 0° C. The present disclosure also relates to a method of grinding a wafer using the back grinding tape.
Public/Granted literature
- US20210035847A1 BACK GRINDING TAPE Public/Granted day:2021-02-04
Information query
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