发明授权
- 专利标题: Back grinding tape
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申请号: US16964364申请日: 2019-06-04
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公开(公告)号: US11424153B2公开(公告)日: 2022-08-23
- 发明人: Mi Seon Yoon , Sera Kim , Kwang Joo Lee , Bora Yeon , Sang Hwan Kim , Eun Yeong Kim
- 申请人: LG CHEM, LTD.
- 申请人地址: KR Seoul
- 专利权人: LG CHEM, LTD.
- 当前专利权人: LG CHEM, LTD.
- 当前专利权人地址: KR Seoul
- 代理机构: Rothwell, Figg, Ernst & Manbeck, P.C.
- 优先权: KR10-2018-0064315 20180604
- 国际申请: PCT/KR2019/006708 WO 20190604
- 国际公布: WO2019/235805 WO 20191212
- 主分类号: H01L21/683
- IPC分类号: H01L21/683 ; H01L21/304 ; C09J7/29 ; B32B27/36 ; B32B7/14
摘要:
The present disclosure relates to a back grinding tape including a polymer resin layer including a urethane (meth)acrylate resin containing 10 to 40 wt % of a repeating unit derived from a (meth)acrylate monomer or oligomer having a glass transition temperature of 0° C. or higher, wherein the polymer resin layer has a glass transition temperature of −30° C. to 0° C. The present disclosure also relates to a method of grinding a wafer using the back grinding tape.
公开/授权文献
- US20210035847A1 BACK GRINDING TAPE 公开/授权日:2021-02-04
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