- Patent Title: Spin orbit torque (SOT) memory devices and methods of fabrication
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Application No.: US16024393Application Date: 2018-06-29
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Publication No.: US11444237B2Publication Date: 2022-09-13
- Inventor: Noriyuki Sato , Tanay Gosavi , Gary Allen , Sasikanth Manipatruni , Kaan Oguz , Kevin O'Brien , Christopher Wiegand , Angeline Smith , Tofizur Rahman , Ian Young , Ben Buford
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/12 ; H01L27/22 ; G11C11/16 ; H01F10/32 ; H01L43/10 ; G11C11/14

Abstract:
A spin orbit torque (SOT) memory device includes a SOT electrode having a spin orbit coupling material. The SOT electrode has a first sidewall and a second sidewall opposite to the first sidewall. The SOT memory device further includes a magnetic tunnel junction device on a portion of the SOT electrode. A first MTJ sidewall intersects the first SOT sidewall and a portion of the first MTJ sidewall and the SOT sidewall has a continuous first slope. The MTJ device has a second sidewall that does not extend beyond the second SOT sidewall and at least a portion of the second MTJ sidewall has a second slope.
Public/Granted literature
- US20200006630A1 SPIN ORBIT TORQUE (SOT) MEMORY DEVICES AND METHODS OF FABRICATION Public/Granted day:2020-01-02
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