Invention Grant
- Patent Title: Semiconductor memory device and manufacturing method thereof
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Application No.: US16807625Application Date: 2020-03-03
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Publication No.: US11456309B2Publication Date: 2022-09-27
- Inventor: Yusuke Shima
- Applicant: Kioxia Corporation
- Applicant Address: JP Minato-ku
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-155604 20190828
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; G11C5/06 ; G11C5/02 ; H01L29/04 ; H01L21/67 ; H01L21/768 ; H01L21/3105 ; H01L21/3065 ; H01L27/11582

Abstract:
A semiconductor memory device includes a first region where a plurality of conductive layers, a plurality of insulating layers, a semiconductor layer, and a gate insulating layer are formed and a second region different from the first region above a substrate. The plurality of conductive layers include a plurality of first conductive layers and a plurality of second conductive layers. The semiconductor memory device includes a plurality of first films different from the first conductive layers disposed in same layers as the plurality of first conductive layers in the second region and a plurality of second films different from the second conductive layers and the first films disposed in same layers as the plurality of second conductive layers in the second region.
Public/Granted literature
- US20210066330A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-03-04
Information query
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