Invention Grant
- Patent Title: Piezoelectric sensor apparatus
-
Application No.: US16512020Application Date: 2019-07-15
-
Publication No.: US11487381B2Publication Date: 2022-11-01
- Inventor: Wei-Yan Shih , Steve Kummerl , Mark Stephen Toth , Alok Lohia , Terry Lee Sculley , Seung Bae Lee , Scott Robert Summerfelt
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Charles A. Brill; Frank D. Cimino
- Main IPC: G01L1/18
- IPC: G01L1/18 ; G06F3/041 ; G01L1/16 ; G01L1/22

Abstract:
An integrated force sensing element includes a piezoelectric sensor formed in an integrated circuit (IC) chip and a strain gauge at least partially overlying the piezoelectric sensor, where the piezoelectric sensor is able to flex. A human-machine interface using the integrated force sensing element is also disclosed and may include a conditioning circuit, temperature gauge, FRAM and a processor core.
Public/Granted literature
- US20190339806A1 INTEGRATED FORCE SENSING ELEMENT Public/Granted day:2019-11-07
Information query