- 专利标题: Embedded memory devices
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申请号: US16828489申请日: 2020-03-24
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公开(公告)号: US11502242B2公开(公告)日: 2022-11-15
- 发明人: Ashim Dutta , Chih-Chao Yang , Michael Rizzolo , Theodorus E. Standaert
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 L. Jeffrey Kelly
- 主分类号: H01L43/02
- IPC分类号: H01L43/02 ; H01L43/12 ; H01F41/34 ; G11C11/16 ; H01F10/32
摘要:
A semiconductor device includes a base structure of an embedded memory device including a bottom electrode contact (BEC) landing pad within a memory area of the embedded memory device and a first metallization level having at least a first conductive line within a logic area of the embedded memory device, a cap layer disposed on the base structure, a BEC disposed through the cap layer on the BEC landing pad, a memory pillar disposed on the BEC and the cap layer, encapsulation layers encapsulating the memory pillar to protect the memory stack, and a second metallization level including a second conductive line surrounding the top electrode, a via disposed on the first conductive line such that the second via is below the top electrode, and a third conductive line disposed on the via to enable the memory pillar to be fitted between the first and second metallization levels.
公开/授权文献
- US20210305494A1 EMBEDDED MEMORY DEVICES 公开/授权日:2021-09-30
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