- 专利标题: Capacitance fine tuning by fin capacitor design
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申请号: US17149006申请日: 2021-01-14
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公开(公告)号: US11515247B2公开(公告)日: 2022-11-29
- 发明人: Nosun Park , Changhan Hobie Yun , Daniel Daeik Kim , Sameer Sunil Vadhavkar , Paragkumar Ajaybhai Thadesar
- 申请人: QUALCOMM Incorporated
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM Incorporated
- 当前专利权人: QUALCOMM Incorporated
- 当前专利权人地址: US CA San Diego
- 代理机构: Qualcomm Incorporated
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L23/522 ; H01L21/70 ; H01L27/01
摘要:
A device includes a main capacitor composed of a first plate of a first back-end-of-line (BEOL) metallization layer, a main insulator layer on the first plate, and a second plate on the main insulator layer. The second plate is composed of a second BEOL metallization layer. The device includes a first tuning capacitor of a first portion of a first BEOL interconnect trace coupled to the first plate of the main capacitor through first BEOL sideline traces. The first tuning capacitor is composed of a first insulator layer on a surface and sidewalls of the first portion of the first BEOL interconnect trace. The first tuning capacitor includes a second BEOL interconnect trace on a surface and sidewalls of the first insulator layer. The device includes a first via capture pad coupled to the second BEOL interconnect trace of the first tuning capacitor.
公开/授权文献
- US20220223516A1 CAPACITANCE FINE TUNING BY FIN CAPACITOR DESIGN 公开/授权日:2022-07-14
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