- Patent Title: Epitaxial layers on contact electrodes for thin- film transistors
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Application No.: US16142036Application Date: 2018-09-26
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Publication No.: US11522060B2Publication Date: 2022-12-06
- Inventor: Seung Hoon Sung , Justin Weber , Matthew Metz , Arnab Sen Gupta , Abhishek Sharma , Benjamin Chu-Kung , Gilbert Dewey , Charles Kuo , Nazila Haratipour , Shriram Shivaraman , Van H. Le , Tahir Ghani , Jack T. Kavalieros , Sean Ma
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/08 ; H01L29/205 ; H01L29/49 ; H01L29/786 ; H01L29/45 ; H01L27/108 ; H01L21/02 ; H01L29/267 ; H01L29/66

Abstract:
Embodiments herein describe techniques for a thin-film transistor (TFT) above a substrate. The transistor includes a contact electrode having a conductive material above the substrate, an epitaxial layer above the contact electrode, and a channel layer including a channel material above the epitaxial layer and above the contact electrode. The channel layer is in contact at least partially with the epitaxial layer. A conduction band of the channel material and a conduction band of a material of the epitaxial layer are substantially aligned with an energy level of the conductive material of the contact electrode. A bandgap of the material of the epitaxial layer is smaller than a bandgap of the channel material. Furthermore, a gate electrode is above the channel layer, and separated from the channel layer by a gate dielectric layer. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20200098875A1 EPITAXIAL LAYERS ON CONTACT ELECTRODES FOR THIN-FILM TRANSISTORS Public/Granted day:2020-03-26
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