Invention Grant
- Patent Title: Exhaust gas processing apparatus
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Application No.: US16983285Application Date: 2020-08-03
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Publication No.: US11527422B2Publication Date: 2022-12-13
- Inventor: Takafumi Sekine , Takanori Inada , Kazutomo Miyazaki , Naoya Hanafusa
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2019-152118 20190822
- Main IPC: B01D47/02
- IPC: B01D47/02 ; B01D47/06 ; B01D53/68 ; B01D53/78 ; H01L21/67

Abstract:
There is provided an exhaust gas processing apparatus configured to cause a processing gas to be exposed to or come into contact with a liquid and thereby detoxify the processing gas. The exhaust gas processing apparatus comprises a suction casing provided with an inlet which the processing gas is sucked into and with an outlet which the processing gas is flowed out from; a liquid tank configured to receive an outlet-side part of the suction casing and store the liquid therein; and one or multiple spray nozzles placed in the liquid tank. The outlet of the suction casing is arranged to be located above a liquid surface of the liquid stored in the liquid tank. The one or multiple spray nozzles are configured to spray the liquid from around the outlet of the suction casing to a peripheral part of the outlet.
Public/Granted literature
- US20210057236A1 EXHAUST GAS PROCESSING APPARATUS Public/Granted day:2021-02-25
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