Invention Grant
- Patent Title: Connecting techniques for stacked substrates
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Application No.: US16587568Application Date: 2019-09-30
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Publication No.: US11532586B2Publication Date: 2022-12-20
- Inventor: Hsiang-Jen Tseng , Wei-Yu Chen , Ting-Wei Chiang , Li-Chun Tien
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/065 ; H01L23/528 ; H01L25/00 ; H01L21/768 ; H01L23/48 ; H01L21/822 ; H01L27/06 ; H01L23/535 ; H01L21/74 ; H01L25/07 ; H01L27/118 ; H01L23/522 ; H01L23/532

Abstract:
The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a first device tier including a first semiconductor substrate having a first plurality of devices. A second semiconductor substrate is formed over the first device tier. A first conductive layer is formed within the second semiconductor substrate, and a second conductive layer is formed within the second semiconductor substrate and over the first conductive layer. The first conductive layer and the second conductive layer have different patterns as viewed from a top-view. A second plurality of devices are formed on the second semiconductor substrate. The first and second conductive layers are configured to electrically couple the first plurality of devices and the second plurality of devices.
Public/Granted literature
- US20200027854A1 CONNECTING TECHNIQUES FOR STACKED SUBSTRATES Public/Granted day:2020-01-23
Information query
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