Invention Grant
- Patent Title: Non-volatile memory device and method for fabricating the same
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Application No.: US16793930Application Date: 2020-02-18
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Publication No.: US11532716B2Publication Date: 2022-12-20
- Inventor: Chia-Wen Wang , Chien-Hung Chen , Chia-Hui Huang , Jen Yang Hsueh , Ling Hsiu Chou , Chih-Yang Hsu
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Priority: CN202010022120.7 20200109
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L27/11521 ; H01L29/51 ; H01L29/788 ; H01L21/762 ; H01L21/28 ; H01L29/66 ; G11C16/16 ; G11C16/14

Abstract:
A non-volatile memory device includes a substrate. A plurality of shallow trench isolation (STI) lines are disposed on the substrate and extend along a first direction. A memory gate structure is disposed on the substrate between adjacent two of the plurality of STI lines. A trench line is disposed in the substrate and extends along a second direction intersecting the first direction, wherein the trench line also crosses top portions of the plurality of STI lines. A conductive line is disposed in the trench line and used as a selection line to be coupled to the memory gate structure.
Public/Granted literature
- US20210217866A1 NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-07-15
Information query
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