MEMORY STRUCTURE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20240114688A1

    公开(公告)日:2024-04-04

    申请号:US17990738

    申请日:2022-11-21

    CPC classification number: H01L27/11568 H01L27/11521

    Abstract: A memory structure including a substrate, a first doped region, a second doped region, a first gate, a second gate, a first charge storage structure, and a second charge storage structure is provided. The first gate is located on the first doped region. The second gate is located on the second doped region. The first charge storage structure is located between the first gate and the first doped region. The first charge storage structure includes a first tunneling dielectric layer, a first dielectric layer, and a first charge storage layer. The second charge storage structure is located between the second gate and the second doped region. The second charge storage structure includes a second tunneling dielectric layer, a second dielectric layer, and a second charge storage layer. The thickness of the second tunneling dielectric layer is greater than the thickness of the first tunneling dielectric layer.

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