Invention Grant
- Patent Title: Vacuum pump
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Application No.: US17040799Application Date: 2019-03-20
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Publication No.: US11542950B2Publication Date: 2023-01-03
- Inventor: Tooru Miwata , Yoshiyuki Takai , Yoshiyuki Sakaguchi
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JPJP2018-069353 20180330
- International Application: PCT/JP2019/011930 WO 20190320
- International Announcement: WO2019/188732 WO 20191003
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/048 ; F04D29/58

Abstract:
A vacuum pump capable of suppressing the solidification of gas in a normal operation of a pump is provided. Provided is a vacuum pump including a casing that has an inlet port for sucking gas from outside and an outlet port for exhausting the gas to the outside; a turbo-molecular-pump mechanism that is disposed in the casing and includes rotor blades and stator blades alternately arranged in multiple stages in an axial direction; a thread-groove-pump mechanism that is disposed in the casing and is connectedly disposed on an exhaust side of the turbo-molecular-pump mechanism; first temperature regulating means that is configured to regulate cooling of the turbo-molecular-pump mechanism; and second temperature regulating means that is configured to regulate heating of the thread-groove-pump mechanism.
Public/Granted literature
- US20210010479A1 VACUUM PUMP Public/Granted day:2021-01-14
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