Invention Grant
- Patent Title: Integrated chip die carrier exchanger
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Application No.: US16853846Application Date: 2020-04-21
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Publication No.: US11545382B2Publication Date: 2023-01-03
- Inventor: Chien-Fa Lee , Hsu-Shui Liu , Jiun-Rong Pai , Pin-Yi Hsin , Shou-Wen Kuo , Patrick Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: B08B3/04
- IPC: B08B3/04 ; H01L21/677 ; B08B3/08

Abstract:
The present disclosure, in some embodiments, relates to an integrated chip processing tool. The integrated chip processing tool includes a first transfer module and a second transfer module. The first transfer module has a first robotic arm disposed within a housing. The first transfer module is configured to receive a single and unitary first die tray configured to hold a plurality of integrated chip (IC) die and to concurrently transfer all of the plurality of IC die held by the single and unitary first die tray to a single and unitary die boat. The second transfer module has an additional robotic arm disposed within the housing and configured to concurrently transfer all of the plurality of IC die from the single and unitary die boat to a single and unitary second die tray.
Public/Granted literature
- US20200251367A1 INTEGRATED CHIP DIE CARRIER EXCHANGER Public/Granted day:2020-08-06
Information query
IPC分类: