Invention Grant
- Patent Title: Attachment of stress sensitive integrated circuit dies
-
Application No.: US16759659Application Date: 2018-11-16
-
Publication No.: US11548781B2Publication Date: 2023-01-10
- Inventor: Casper Van Der Avoort , Willem Frederik Adrianus Besling , Remco Henricus Wilhelmus Pijnenburg , Olaf Wunnicke , Coen Tak
- Applicant: Sciosense B.V.
- Applicant Address: NL AE Eindhoven
- Assignee: Sciosense B.V.
- Current Assignee: Sciosense B.V.
- Current Assignee Address: NL AE Eindhoven
- Agency: Slater Matsil, LLP
- International Application: PCT/EP2018/081569 WO 20181116
- International Announcement: WO2019/096998 WO 20190523
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81B7/02 ; G01L9/00 ; H04R1/04 ; H04R19/04

Abstract:
A die attachment to a support is disclosed. In an embodiment, a semiconductor package includes a support and a die attached to the support by an adhesive on a backside of the die, wherein the die includes a capacitive pressure sensor integrated on a CMOS read-out circuit, and wherein the adhesive covers only a part of the backside of the die.
Information query