Invention Grant
- Patent Title: Organic contamination free surface machining
-
Application No.: US17241241Application Date: 2021-04-27
-
Publication No.: US11555250B2Publication Date: 2023-01-17
- Inventor: Yuanhong Guo , Sheng Michael Guo , Marek W Radko , Steven Victor Sansoni , Nagendra Madiwal , Matvey Farber , Pingping Gou , Song-Moon Suh , Jeffrey C. Hudgens , Yuji Murayama , Anurag Bansal , Shaofeng Chen , Michael Kuchar
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: C23F17/00
- IPC: C23F17/00 ; B23C3/00 ; C23F1/16 ; C23F1/20 ; B08B3/04 ; H01L21/67

Abstract:
A method includes receiving a metal component including a raw surface that includes a metal base, a first native oxide disposed on the metal base, and hydrocarbons disposed on the metal base. The method further includes machining the raw surface of the metal component to remove the first native oxide and a first portion of the hydrocarbons from the metal base. The machining generates an as-machined surface of the metal component including the metal base without the first native oxide and without the first portion of the hydrocarbons. The method further includes performing a surface machining of the as-machined surface of the metal component to remove a second portion of the hydrocarbons. The method further includes surface treating the metal component to remove a third portion of the hydrocarbons. The method further includes performing a cleaning of the metal component and drying the metal component.
Public/Granted literature
- US20210339354A1 ORGANIC CONTAMINATION FREE SURFACE MACHINING Public/Granted day:2021-11-04
Information query
IPC分类: