公开(公告)号：US11555250B2

公开(公告)日：2023-01-17

申请号：US17241241

申请日：2021-04-27

Applicant: Applied Materials, Inc.

Inventor： Yuanhong Guo ,  Sheng Michael Guo ,  Marek W Radko ,  Steven Victor Sansoni ,  Nagendra Madiwal ,  Matvey Farber ,  Pingping Gou ,  Song-Moon Suh ,  Jeffrey C. Hudgens ,  Yuji Murayama ,  Anurag Bansal ,  Shaofeng Chen ,  Michael Kuchar

IPC: C23F17/00 ,  B23C3/00 ,  C23F1/16 ,  C23F1/20 ,  B08B3/04 ,  H01L21/67

Abstract: A method includes receiving a metal component including a raw surface that includes a metal base, a first native oxide disposed on the metal base, and hydrocarbons disposed on the metal base. The method further includes machining the raw surface of the metal component to remove the first native oxide and a first portion of the hydrocarbons from the metal base. The machining generates an as-machined surface of the metal component including the metal base without the first native oxide and without the first portion of the hydrocarbons. The method further includes performing a surface machining of the as-machined surface of the metal component to remove a second portion of the hydrocarbons. The method further includes surface treating the metal component to remove a third portion of the hydrocarbons. The method further includes performing a cleaning of the metal component and drying the metal component.