Invention Grant
- Patent Title: Methods for depositing coatings on aerospace components
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Application No.: US17832568Application Date: 2022-06-03
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Publication No.: US11560804B2Publication Date: 2023-01-24
- Inventor: Yuriy Melnik , Sukti Chatterjee , Kaushal Gangakhedkar , Jonathan Frankel , Lance A. Scudder , Pravin K. Narwankar , David Alexander Britz , Thomas Knisley , Mark Saly , David Thompson
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: F01D5/28
- IPC: F01D5/28 ; C23C16/455 ; C23C16/34 ; C23C16/40 ; C23C16/30 ; C23C16/56 ; F01D9/02 ; F01D25/12 ; F01D25/28 ; F23R3/28 ; C07F11/00 ; F01D25/14

Abstract:
Methods for forming protective coatings on aerospace components are provided. In one or more embodiments, the method includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a first deposition process (e.g., CVD or ALD), and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second deposition process. The first deposited layer and the second deposited layer have different compositions from each other. The method also includes repeating the first deposition process and the second deposition process to form a nanolaminate film stack having from 2 pairs to about 1,000 pairs of the first deposited layer and the second deposited layer consecutively deposited on each other.
Public/Granted literature
- US20220298920A1 METHODS FOR DEPOSITING COATINGS ON AEROSPACE COMPONENTS Public/Granted day:2022-09-22
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