Invention Grant
- Patent Title: Semiconductor device and manufacturing method thereof
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Application No.: US16924162Application Date: 2020-07-08
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Publication No.: US11569294B2Publication Date: 2023-01-31
- Inventor: Mauricio Manfrini , Chung-Te Lin , Ken-Ichi Goto
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L29/423 ; H01L23/528 ; H01L43/10 ; H01L43/08 ; H01L43/12 ; H01L43/02

Abstract:
A semiconductor device includes a semiconductor substrate and an interconnection region disposed on the semiconductor substrate. The interconnection region includes stacked metallization levels, a magnetic tunnel junction, and a transistor. The magnetic tunnel junction is formed on a first conductive pattern of a first metallization level of the stacked metallization levels. The transistor is formed on a second conductive pattern of a second metallization level of the stacked metallization levels. The transistor is a vertical gate-all-around transistor. A drain contact of the transistor is electrically connected to the magnetic tunnel junction by the first conductive pattern of the first metallization level. The second metallization level is closer to the semiconductor substrate than the first metallization level.
Public/Granted literature
- US20220013580A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-01-13
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