- Patent Title: Integrated assemblies having vertically-extending channel material with alternating regions of different dopant distributions, and methods of forming integrated assemblies
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Application No.: US17672659Application Date: 2022-02-15
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Publication No.: US11631697B2Publication Date: 2023-04-18
- Inventor: Shyam Surthi , Byeung Chul Kim , Richard J. Hill , Francois H. Fabreguette , Gurtej S. Sandhu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; G11C5/06 ; H01L27/11565 ; H01L27/11556 ; H01L27/11519 ; H01L27/11524 ; H01L27/1157

Abstract:
Some embodiments include a memory array which has a vertical stack of alternating insulative levels and wordline levels. A channel material extends vertically along the stack. The channel material includes a semiconductor composition and has first segments alternating with second segments. The first segments are adjacent the wordline levels and the second segments are adjacent the insulative levels. The first segments have a first dopant distribution and the second segments have a second dopant distribution which is different from the first dopant distribution. Some embodiments include methods of forming integrated assemblies.
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