Invention Grant
- Patent Title: Semiconductor memory device with protruding separating portions
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Application No.: US16986853Application Date: 2020-08-06
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Publication No.: US11672112B2Publication Date: 2023-06-06
- Inventor: Genki Kawaguchi , Yasuhito Yoshimizu , Yusuke Shima
- Applicant: Kioxia Corporation
- Applicant Address: JP Minato-ku
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 2019146505 2019.08.08
- Main IPC: G11C5/06
- IPC: G11C5/06 ; H01L27/11556 ; H01L27/11582 ; G11C16/04 ; G11C5/02

Abstract:
According to one embodiment, a semiconductor memory device includes: a plurality of first insulating layers; a plurality of first interconnect layers stacked alternately with the first insulating layers; a plurality of second interconnect layers arranged adjacently to the first interconnect layers; and a separation region including a plurality of first portions provided between the first interconnect layers and the second interconnect layers, and a plurality of second portions protruding from an outer periphery of each of the first portions. The second portions are linked to each other. The first interconnect layers and the second interconnect layers are separated from each other by the first portions and the linked second portions.
Public/Granted literature
- US20210043640A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-02-11
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