- Patent Title: Plasma erosion resistant rare-earth oxide based thin film coatings
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Application No.: US17339248Application Date: 2021-06-04
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Publication No.: US11680308B2Publication Date: 2023-06-20
- Inventor: Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Tom Cho
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- The original application number of the division: US14306583 2014.06.17
- Main IPC: B32B18/00
- IPC: B32B18/00 ; C23C14/08 ; C23C14/22 ; H01J37/32 ; C23C14/34
Abstract:
A chamber component for a process chamber comprises a ceramic body and one or more protective layer on at least one surface of the ceramic body, wherein the one or more protective layer comprises Y3Al5O12 having a dielectric constant of 9.76+/−up to 30% and a hermiticity of 4.4E-10 cm3/s+/−up to 30%.
Public/Granted literature
- US20210317563A1 PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS Public/Granted day:2021-10-14
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