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公开(公告)号：US10119188B2
公开(公告)日：2018-11-06
申请号：US15814597
申请日：2017-11-16
Applicant: Applied Materials, Inc.
Inventor： Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Tom Cho
Abstract: An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Y4Al2O9, Er2O3, Gd2O3, Er3Al5O12, Gd3Al5O12 and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
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公开(公告)号：US09850568B2
公开(公告)日：2017-12-26
申请号：US14306583
申请日：2014-06-17
Applicant: Applied Materials, Inc.
Inventor： Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Tom Cho
CPC classification number: C23C14/08 , B32B18/00 , C23C14/083 , C23C14/22 , C23C14/228 , C23C14/34 , H01J37/32477 , H01J37/32495 , Y10T428/24355 , Y10T428/24967 , Y10T428/24975 , Y10T428/265
Abstract: An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Y4Al2O9, Er2O3, Gd2O3, Er3Al5O12, Gd3Al5O12 and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
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公开(公告)号：US20180102237A1
公开(公告)日：2018-04-12
申请号：US15835923
申请日：2017-12-08
Applicant: Applied Materials, Inc.
Inventor： Jennifer Y. Sun , Biraja P. Kanungo , Tom Cho
IPC: H01J37/32 , C23C4/134 , C23C4/11 , C04B41/50 , C04B41/00 , C23C16/44 , C04B41/87 , C04B35/00 , C04B35/10 , C04B35/581 , C04B41/45
CPC classification number: H01J37/32495 , C04B41/009 , C04B41/5045 , C04B41/87 , C23C4/11 , C23C4/134 , C23C16/4404 , Y10T428/131 , Y10T428/26 , C04B35/00 , C04B35/10 , C04B35/581 , C04B41/4527 , C04B41/5031 , C04B41/5042
Abstract: An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 0 mol % to about 55 mol %, and Al2O3 in a range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 30 mol % to about 60 mol %, ZrO2 in a range between about 0 mol % to about 20 mol %, and Al2O3 in a range between about 30 mol % to about 60 mol %.
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公开(公告)号：US20140377504A1
公开(公告)日：2014-12-25
申请号：US14306583
申请日：2014-06-17
Applicant: Applied Materials, Inc.
Inventor： Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Tom Cho
CPC classification number: C23C14/08 , B32B18/00 , C23C14/083 , C23C14/22 , C23C14/228 , C23C14/34 , H01J37/32477 , H01J37/32495 , Y10T428/24355 , Y10T428/24967 , Y10T428/24975 , Y10T428/265
Abstract: An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Y4Al2O9, Er2O3, Gd2O3, Er3Al5O12, Gd3Al5O12 and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
Abstract translation: 一种制品包括主体和至少一个在身体的至少一个表面上的保护层。 所述至少一个保护层是厚度小于约20微米的薄膜，其包含选自Y 3 Al 5 O 12，Y 4 Al 2 O 9，Er 2 O 3，Gd 2 O 3，Er 3 Al 5 O 12，Gd 3 Al 5 O 12和包含Y 4 Al 2 O 9的陶瓷化合物的陶瓷， Y2O3-ZrO2溶液。
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公开(公告)号：US20210317563A1
公开(公告)日：2021-10-14
申请号：US17339248
申请日：2021-06-04
Applicant: Applied Materials, Inc.
Inventor： Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Tom Cho
Abstract: A chamber component for a process chamber comprises a ceramic body and one or more protective layer on at least one surface of the ceramic body, wherein the one or more protective layer comprises Y3Al5O12 having a dielectric constant of 9.76+/−up to 30% and a hermiticity of 4.4E-10 cm3/s+/−up to 30%.
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Patent Agency Ranking
公开(公告)号：US20140349073A1
公开(公告)日：2014-11-27
申请号：US14282824
申请日：2014-05-20
Applicant: Applied Materials, Inc.
Inventor： Jennifer Y. Sun , Biraja Kanungo , Tom Cho , Ying Zhang
IPC: H01J37/32
CPC classification number: H01J37/32807 , C23C24/04 , H01J37/3244 , Y10T428/24413
Abstract: A method for coating a component for use in a semiconductor chamber for plasma etching includes providing the component and loading the component in a deposition chamber. A pressure in the deposition chamber is reduced to below atmospheric pressure. A coating is deposited on the component by spraying an aerosol comprising a suspension of a first type of metal oxide nanoparticle and a second type of metal oxide nanoparticle onto the component at approximately room temperature.
Abstract translation: 用于涂覆用于等离子体蚀刻的半导体室中的部件的方法包括提供部件并将部件装载到沉积室中。 沉积室中的压力降低到低于大气压。 通过在大约室温下将包含第一类金属氧化物纳米颗粒和第二类型的金属氧化物纳米颗粒的悬浮液的气溶胶喷涂到组分上来将组分沉积在组分上。
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公开(公告)号：US20250092491A1
公开(公告)日：2025-03-20
申请号：US18370534
申请日：2023-09-20
Applicant: APPLIED MATERIALS, INC.
Inventor： Chien-Min Liao , Chao Liu , Tom Cho , Hyeon Geu Kim , Andrew Nguyen , Hari Ponnekanti , Mingdong Li , Changgong Wang , Bruce Alger
IPC: C22C21/06 , B22F1/16 , B22F1/17 , H01J37/32 , H01L21/683 , H01L21/687
Abstract: Described herein is a chamber component having a body comprising one or more aluminum alloy compositions. A surface of the chamber component has an aluminum alloy composition comprising aluminum (Al), wherein the Al is included in an amount of about 85 wt % to about 98 wt %, based on total weight of the alloy composition, and magnesium (Mg), wherein the Mg is included in an amount of about 1 wt % to about 5 wt %, based on total weight of the alloy composition. The aluminum alloy composition further includes one or more additional chemical elements that form an equiaxed grain structure of an aluminum matrix of the alloy composition.
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公开(公告)号：US11053581B2
公开(公告)日：2021-07-06
申请号：US16685341
申请日：2019-11-15
Applicant: Applied Materials, Inc.
Inventor： Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Tom Cho
Abstract: An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Er2O3, Er3Al5O12, and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
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公开(公告)号：US20180073125A1
公开(公告)日：2018-03-15
申请号：US15814597
申请日：2017-11-16
Applicant: Applied Materials, Inc.
Inventor： Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Tom Cho
CPC classification number: C23C14/08 , B32B18/00 , C23C14/083 , C23C14/22 , C23C14/228 , C23C14/34 , H01J37/32477 , H01J37/32495 , Y10T428/24355 , Y10T428/24967 , Y10T428/24975 , Y10T428/265
Abstract: An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Y4Al2O9, Er2O3, Gd2O3, Er3Al5O12, Gd3Al5O12 and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
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公开(公告)号：US09865434B2
公开(公告)日：2018-01-09
申请号：US13954808
申请日：2013-07-30
Applicant: Applied Materials, Inc.
Inventor： Jennifer Y. Sun , Biraja P. Kanungo , Tom Cho
IPC: B32B1/02 , C23C4/11 , H01J37/32 , C23C16/44 , C04B41/87 , C04B41/00 , C04B41/50 , C23C4/134 , B32B1/08
CPC classification number: H01J37/32495 , C04B41/009 , C04B41/5045 , C04B41/87 , C23C4/11 , C23C4/134 , C23C16/4404 , Y10T428/131 , Y10T428/26 , C04B35/00 , C04B35/10 , C04B35/581 , C04B41/4527 , C04B41/5031 , C04B41/5042
Abstract: An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 0 mol % to about 55 mol %, and Al2O3 in range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively inculde Y2O3 in a range between about 30 mol % to about 60 mol %, ZrO2 in a range between about 0 mol % to about 20 mol %, and Al2O3 in a range between about 30 mol % to about 60 mol %.
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