Invention Grant
- Patent Title: Chemical supply unit, substrate processing apparatus, and substrate processing method
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Application No.: US17138301Application Date: 2020-12-30
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Publication No.: US11684955B2Publication Date: 2023-06-27
- Inventor: Tae Suk Yun , Hyeon Suk Park
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: KR 20190179872 2019.12.31
- Main IPC: B08B3/08
- IPC: B08B3/08 ; B08B3/02 ; B08B13/00 ; B08B3/10 ; H01L21/67
Abstract:
An apparatus for processing a substrate includes a housing having a processing space in which the substrate is processed, a support unit that supports the substrate in the processing space, a nozzle that dispenses a chemical onto the substrate placed on the support unit, a chemical supply unit that supplies the chemical to the nozzle, and a controller that controls the chemical supply unit.
Public/Granted literature
- US20210197237A1 CHEMICAL SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD Public/Granted day:2021-07-01
Information query
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