公开(公告)号：US11684955B2

公开(公告)日：2023-06-27

申请号：US17138301

申请日：2020-12-30

Applicant: SEMES CO., LTD.

Inventor： Tae Suk Yun ,  Hyeon Suk Park

IPC: B08B3/08 ,  B08B3/02 ,  B08B13/00 ,  B08B3/10 ,  H01L21/67

CPC classification number: B08B3/08 ,  B08B3/02 ,  B08B3/10 ,  B08B13/00 ,  B08B2203/007 ,  H01L21/67017 ,  H01L21/67051

Abstract: An apparatus for processing a substrate includes a housing having a processing space in which the substrate is processed, a support unit that supports the substrate in the processing space, a nozzle that dispenses a chemical onto the substrate placed on the support unit, a chemical supply unit that supplies the chemical to the nozzle, and a controller that controls the chemical supply unit.