Invention Grant
- Patent Title: Piezoelectric device and method of manufacturing the same
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Application No.: US16777926Application Date: 2020-01-31
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Publication No.: US11706988B2Publication Date: 2023-07-18
- Inventor: Shinsuke Ikeuchi , Tetsuya Kimura , Katsumi Fujimoto , Yutaka Kishimoto , Fumiya Kurokawa
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP 17224671 2017.11.22
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H10N30/20 ; H10N30/045 ; H10N30/50 ; H10N30/87 ; H10N30/88 ; H10N30/00

Abstract:
A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.
Public/Granted literature
- US20200168787A1 PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-05-28
Information query
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