- 专利标题: Piezoelectric device and method of manufacturing the same
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申请号: US16777926申请日: 2020-01-31
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公开(公告)号: US11706988B2公开(公告)日: 2023-07-18
- 发明人: Shinsuke Ikeuchi , Tetsuya Kimura , Katsumi Fujimoto , Yutaka Kishimoto , Fumiya Kurokawa
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Nagaokakyo
- 专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP 17224671 2017.11.22
- 主分类号: H01L41/09
- IPC分类号: H01L41/09 ; H10N30/20 ; H10N30/045 ; H10N30/50 ; H10N30/87 ; H10N30/88 ; H10N30/00
摘要:
A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.
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