Invention Grant
- Patent Title: Substrate support unit and substrate treating apparatus having the same
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Application No.: US16906237Application Date: 2020-06-19
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Publication No.: US11721575B2Publication Date: 2023-08-08
- Inventor: Inhwang Park , Gui Su Park , Young Hun Lee , Youngseop Choi , Seung Hoon Oh , Jonghyeon Woo , Jin Mo Jae
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20190074238 2019.06.21
- Main IPC: H01L21/687
- IPC: H01L21/687 ; B08B3/04 ; H01L21/67

Abstract:
An apparatus for supporting a substrate includes a rotatable spin head that supports the substrate, a hollow shaft that is connected with the spin head and that transmits torque to the spin head, a nozzle assembly that is disposed in an interior space of the spin head so as not to rotate and that supplies a treatment liquid to a backside of the substrate, and a sealing member that seals a gap between the spin head and the nozzle assembly using a magnetic fluid.
Information query
IPC分类: