Invention Grant
- Patent Title: Metal ribs in electromechanical devices
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Application No.: US17002357Application Date: 2020-08-25
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Publication No.: US11736085B2Publication Date: 2023-08-22
- Inventor: Anindya Poddar , Hau Nguyen , Masamitsu Matsuura
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Dawn Jos; Frank D. Cimino
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/05 ; H03H9/10 ; H03H9/17 ; H03H9/24 ; H03H3/007 ; H03H3/04
Abstract:
In examples, a device comprises a semiconductor die, a thin-film layer, and an air cavity positioned between the semiconductor die and the thin-film layer. The air cavity comprises a resonator positioned on the semiconductor die. A rib couples to a surface of the thin-film layer opposite the air cavity.
Public/Granted literature
- US20220069795A1 METAL RIBS IN ELECTROMECHANICAL DEVICES Public/Granted day:2022-03-03
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