Invention Grant
- Patent Title: Embedded memory pillar
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Application No.: US17484649Application Date: 2021-09-24
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Publication No.: US11751492B2Publication Date: 2023-09-05
- Inventor: Dexin Kong , Ashim Dutta , Ekmini Anuja De Silva , Daniel Schmidt
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Samuel Waldbaum
- Main IPC: G11C13/00
- IPC: G11C13/00 ; H10N70/00 ; H10B61/00 ; H10B63/00 ; H10N50/01 ; H10N50/10 ; H10N50/80 ; H10N50/85

Abstract:
A memory device is provided. The memory device includes a memory stack on a first dielectric layer, and a sidewall spacer on the memory stack. The memory device further includes a conductive cap on the sidewall spacer and the memory stack and an upper metal line on the conductive cap and the sidewall spacer, wherein the upper metal line wraps around the conductive cap, sidewall spacer, and memory stack.
Public/Granted literature
- US20230099303A1 EMBEDDED MEMORY PILLAR Public/Granted day:2023-03-30
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