Invention Grant
- Patent Title: Chamber module and test handler including the same
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Application No.: US17406751Application Date: 2021-08-19
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Publication No.: US11762009B2Publication Date: 2023-09-19
- Inventor: Hyon Jin Lee , Jun Seok Lee
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Agency: KILE PARK REED & HOUTTEMAN PLLC
- Priority: KR 20200110424 2020.08.31
- Main IPC: G01R31/26
- IPC: G01R31/26 ; H01L21/677 ; H01L21/673

Abstract:
A chamber module and a test handler including the same are disclosed. The chamber module includes a soak chamber providing a temperature adjusting space for adjusting a temperature of semiconductor devices, an elevating member disposed in the soak chamber and for elevating a tray in which the semiconductor devices are accommodated, a guide member extending in a vertical direction in the soak chamber and for guiding movement of the elevating member, and a temperature adjusting part for adjusting a temperature of the guide member.
Public/Granted literature
- US20220065920A1 CHAMBER MODULE AND TEST HANDLER INCLUDING THE SAME Public/Granted day:2022-03-03
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