APPARATUS FOR CORRECTING IMPACT POINT OF INK AND SYSTEM FOR TREATING SUBSTRATE WITH THE APPARATUS

    公开(公告)号:US20220009224A1

    公开(公告)日:2022-01-13

    申请号:US17337967

    申请日:2021-06-03

    Abstract: An ink impact point correction apparatus for automatically measuring and correcting an impact point of ink using a pattern on a substrate, on which a coordinate system is displayed, and a substrate treating system including the same are provided. The ink impact point correction apparatus includes a recognition unit for acquiring information on the impact point of ink at a plurality of points located on a substrate; and a correction unit for correcting a position of an ink discharge point on the substrate based on the information on the impact point, wherein a coordinate pattern in the form of a coordinate system is formed at the plurality of points.

    Liquid drop discharge apparatus
    2.
    发明授权

    公开(公告)号:US11161337B2

    公开(公告)日:2021-11-02

    申请号:US16920359

    申请日:2020-07-02

    Abstract: A liquid drop discharge apparatus is proposed. The liquid drop discharge apparatus includes: an inkjet head discharging ink to each of pixels of a substrate; a laser emitter coupled to the inkjet head, and emitting an aiming laser beam by which a discharged position of a liquid drop from the inkjet head to each of the pixels is aimed; a camera capturing an emitted position of the aiming laser beam on the substrate; and a position alignment unit aligning a position of the inkjet head on the basis of image data obtained from the shooting unit.

    Chamber module and test handler including the same

    公开(公告)号:US11762009B2

    公开(公告)日:2023-09-19

    申请号:US17406751

    申请日:2021-08-19

    CPC classification number: G01R31/2642 H01L21/67745 H01L21/67333

    Abstract: A chamber module and a test handler including the same are disclosed. The chamber module includes a soak chamber providing a temperature adjusting space for adjusting a temperature of semiconductor devices, an elevating member disposed in the soak chamber and for elevating a tray in which the semiconductor devices are accommodated, a guide member extending in a vertical direction in the soak chamber and for guiding movement of the elevating member, and a temperature adjusting part for adjusting a temperature of the guide member.

Patent Agency Ranking