公开(公告)号：US11762009B2

公开(公告)日：2023-09-19

申请号：US17406751

申请日：2021-08-19

Applicant: SEMES CO., LTD.

Inventor： Hyon Jin Lee ,  Jun Seok Lee

IPC: G01R31/26 ,  H01L21/677 ,  H01L21/673

CPC classification number: G01R31/2642 ,  H01L21/67745 ,  H01L21/67333

Abstract: A chamber module and a test handler including the same are disclosed. The chamber module includes a soak chamber providing a temperature adjusting space for adjusting a temperature of semiconductor devices, an elevating member disposed in the soak chamber and for elevating a tray in which the semiconductor devices are accommodated, a guide member extending in a vertical direction in the soak chamber and for guiding movement of the elevating member, and a temperature adjusting part for adjusting a temperature of the guide member.