Invention Grant
- Patent Title: Surface treatment apparatus and surface treatment method
-
Application No.: US16951718Application Date: 2020-11-18
-
Publication No.: US11764084B2Publication Date: 2023-09-19
- Inventor: Jung Suk Goh , Sun Mi Kim , Ji Su Hong , Kuk Saeng Kim , Cheng Bin Cui , Pil Kyun Heo
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR 20190151301 2019.11.22
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B3/04
Abstract:
Disclosed is a substrate treatment apparatus. The apparatus includes a support unit that supports and rotates a substrate and a spray unit equipped with one or more nozzles to spray a dual fluid that is a mixture of a cleaning agent and carbon dioxide onto the substrate.
Public/Granted literature
- US20210159092A1 SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD Public/Granted day:2021-05-27
Information query
IPC分类:
