Invention Grant
- Patent Title: System and method for ring frame cleaning and inspection
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Application No.: US17308786Application Date: 2021-05-05
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Publication No.: US11764097B2Publication Date: 2023-09-19
- Inventor: Chien-Fa Lee , Hsu-Shui Liu , Jiun-Rong Pai , Shou-Wen Kuo , Jian-Hung Cheng , M. C. Lin , C. C. Chien , Hsuan Lee , Boris Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- The original application number of the division: US15987581 2018.05.23
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/304 ; H01L21/66 ; H01L21/02

Abstract:
A system and method for cleaning and inspecting ring frames is disclosed here. In one embodiment, a ring frame processing system includes: a cleaning station configured to remove a first tape on a first surface of a ring frame using a first blade, clean first adhesive residues from the first tape on the first surface of the ring frame using a first wheel brush, and remove second adhesive residues from a second tape on a second surface of the ring frame using a second blade; and an inspection station, wherein the inspection station comprises an automated optical inspection system configured to determine the cleanness of the first and second surfaces of the ring frame after cleaning.
Public/Granted literature
- US20210257247A1 SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION Public/Granted day:2021-08-19
Information query
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