Invention Grant
- Patent Title: Bump bonding structure to mitigate space contamination for III-V dies and CMOS dies
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Application No.: US17321858Application Date: 2021-05-17
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Publication No.: US11784460B2Publication Date: 2023-10-10
- Inventor: Jhih-Bin Chen , Ming Chyi Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01S5/02375
- IPC: H01S5/02375 ; H01S5/183 ; H01S5/42 ; H01S5/0237 ; H01S5/02325 ; H01S5/30

Abstract:
Various embodiments of the present disclosure are directed towards a method for forming a vertical cavity surface emitting laser (VCSEL) device. The method includes forming a bond bump and a bond ring over a substrate. A semiconductor die is bonded to the bond ring. A molding layer is formed around the semiconductor die. The molding layer is laterally offset from a cavity between the semiconductor die and the substrate. A VCSEL structure is formed over the bond bump.
Public/Granted literature
- US20210273402A1 BUMP BONDING STRUCTURE TO MITIGATE SPACE CONTAMINATION FOR III-V DIES AND CMOS DIES Public/Granted day:2021-09-02
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