Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US17949925Application Date: 2022-09-21
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Publication No.: US11832373B2Publication Date: 2023-11-28
- Inventor: Yohei Yamazawa , Takehisa Saito , Mayo Uda , Keigo Toyoda , Alok Ranjan , Toshiki Nakajima
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: XSENSUS LLP
- Priority: JP 17188480 2017.09.28
- Main IPC: H05H1/46
- IPC: H05H1/46 ; H01J37/32 ; H01L21/67

Abstract:
A plasma processing apparatus includes an antenna configured to generate plasma of a processing gas in a chamber. The antenna includes: an inner coil provided around the gas supply unit to surround a gas supply unit; and an outer coil provided around the gas supply unit and the inner coil to surround them. The outer coil is configured such that both ends of a wire forming the outer coil are opened; power is supplied from a power supply unit to a central point of the wire; the vicinity of the central point of the wire is grounded; and the outer coil resonates at a wavelength that is a half of a wavelength of the high frequency power. The inner coil is configured such that both ends of a wire forming the inner coil are connected through a capacitor and the inner coil is inductively coupled with the inner coil.
Public/Granted literature
- US20230021588A1 PLASMA PROCESSING APPARATUS Public/Granted day:2023-01-26
Information query
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