- 专利标题: Active thermal interposer device
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申请号: US17841471申请日: 2022-06-15
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公开(公告)号: US11846669B2公开(公告)日: 2023-12-19
- 发明人: Samer Kabbani , Paul Ferrari , Ikeda Hiroki , Kiyokawa Toshiyuki , Gregory Cruzan , Karthik Ranganathan , Todd Berk , Ian Williams , Mohammad Ghazvini , Thomas Jones
- 申请人: Advantest Test Solutions, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Advantest Test Solutions, Inc.
- 当前专利权人: Advantest Test Solutions, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R1/04
摘要:
A stand-alone active thermal interposer device for use in testing a system-in-package device under test (DUT), the active thermal interposer device includes a body layer having a first surface and a second surface, wherein the first surface is operable to be disposed adjacent to a cold plate, and a plurality of heating zones defined across a second surface of the body layer, the plurality of heating zones operable to be controlled by a thermal controller to selectively heat and maintain respective temperatures thereof, the plurality of heating zones operable to heat a plurality of areas of the DUT when the second surface of the body layer is disposed adjacent to an interface surface of the DUT during testing of the DUT.
公开/授权文献
- US20230129112A1 ACTIVE THERMAL INTERPOSER DEVICE 公开/授权日:2023-04-27
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