Invention Grant
- Patent Title: Metal-insulator-metal device with improved performance
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Application No.: US17352969Application Date: 2021-06-21
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Publication No.: US11854959B2Publication Date: 2023-12-26
- Inventor: Min-Feng Kao , Dun-Nian Yaung , Jen-Cheng Liu , Hsing-Chih Lin , Kuan-Hua Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/528 ; H01L27/04 ; H01L49/02

Abstract:
Various embodiments of the present disclosure are directed towards an integrated chip (IC). The IC comprises a first inter-metal dielectric (IMD) structure disposed over a semiconductor substrate. A metal-insulator-metal (MIM) device is disposed over the first IMD structure. The MIM device comprises at least three metal plates that are spaced from one another. The MIM device further comprises a plurality of capacitor insulator structures, where each of the plurality of capacitor insulator structures are disposed between and electrically isolate neighboring metal plates of the at least three metal plates.
Public/Granted literature
- US20220310507A1 METAL-INSULATOR-METAL DEVICE WITH IMPROVED PERFORMANCE Public/Granted day:2022-09-29
Information query
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