- 专利标题: Inkjet platform for fabrication of optical films and structures
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申请号: US17647820申请日: 2022-01-12
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公开(公告)号: US11878532B2公开(公告)日: 2024-01-23
- 发明人: Daihua Zhang , Ludovic Godet , Michael David-Scott Kemp , Kang Luo , Kazuya Daito , Kenneth S. Ledford , Bahubali S. Upadhye , Hemantha Raju , John Rusconi , Elsa Massonneau , Mahendran Chidambaram , Alexey Stepanov , Visweswaren Sivaramakrishnan
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson + Sheridan, LLP
- 优先权: IN 2141021237 2021.05.11
- 主分类号: B41J2/175
- IPC分类号: B41J2/175 ; H01L21/00
摘要:
Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.
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