Invention Grant
- Patent Title: Process for transfer imprinting
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Application No.: US16955402Application Date: 2018-12-19
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Publication No.: US11880131B2Publication Date: 2024-01-23
- Inventor: Christophe Navarro , Celia Nicolet , Xavier Chevalier , Florian Delachat , Hubert Teyssedre
- Applicant: Arkema France
- Applicant Address: FR Colombes
- Assignee: Arkema France
- Current Assignee: Arkema France
- Current Assignee Address: FR Colombes
- Agency: RatnerPrestia
- Priority: FR 62830 2017.12.21
- International Application: PCT/FR2018/053396 2018.12.19
- International Announcement: WO2019/122705A 2019.06.27
- Date entered country: 2020-06-18
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B29C33/62 ; B29C33/42 ; C08F112/08 ; C08F212/08 ; C08F120/26 ; C08F220/28 ; C08F230/02 ; C08F130/02
Abstract:
A process for transfer imprinting using a novel family of anti-sticking layers, such as for nanoimprint lithography processes, is described.
Public/Granted literature
- US20210072639A1 PROCESS FOR TRANSFER IMPRINTING Public/Granted day:2021-03-11
Information query
