Invention Grant
- Patent Title: Three-dimensional memory device with separated contact regions and methods for forming the same
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Application No.: US17397846Application Date: 2021-08-09
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Publication No.: US11889694B2Publication Date: 2024-01-30
- Inventor: Hardwell Chibvongodze , Zhixin Cui , Rajdeep Gautam , Hiroyuki Ogawa
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: THE MARBURY LAW GROUP PLLC
- Main IPC: G11C11/34
- IPC: G11C11/34 ; H10B43/27 ; G11C5/06 ; H01L23/522 ; G11C8/14 ; H01L23/528 ; H10B41/10 ; H10B41/35

Abstract:
A memory die includes an alternating stack of insulating layers and electrically conductive layers through which memory opening fill structures vertically extend. The memory die includes at least three memory array regions interlaced with at least two contact regions, or at least three contact regions interlaced with at least two memory array regions in the same memory plane. A logic die including at least two word line driver regions can be bonded to the memory die. The interlacing of the contact regions and the memory array regions can reduce lateral offset of boundaries of the word line driver regions from boundaries of the contact regions.
Public/Granted literature
- US20230041950A1 THREE-DIMENSIONAL MEMORY DEVICE WITH SEPARATED CONTACT REGIONS AND METHODS FOR FORMING THE SAME Public/Granted day:2023-02-09
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