- 专利标题： Transfer hand and substrate processing apparatus with conductive ring and tilting vacuum pad
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申请号： US17513002申请日： 2021-10-28
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公开(公告)号： US11935779B2公开(公告)日： 2024-03-19
- 发明人: Tae Hoon Lee , Ju Won Kim , Jin Sung Sun , Bo Hee Lee
- 申请人： SEMES CO., LTD.
- 申请人地址： KR Cheonan-si
- 专利权人： SEMES CO., LTD.
- 当前专利权人： SEMES CO., LTD.
- 当前专利权人地址： KR Chungcheongnam-Do
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： KR 20200143571 2020.10.30
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; H01L21/683 ; H01L21/687
摘要：
Various example embodiments provide a transfer hand for transferring a substrate. The transfer hand for transferring the substrate comprises: a body; and a vacuum assembly installed in the body and providing decompression to the bottom surface of a substrate to support the substrate at the upper part of the body; wherein the vacuum assembly comprises: an vacuum pad with conductivity contacting the substrate; and a sealing member provided between the vacuum pad and the body, the sealing member electrically connected to the vacuum pad; wherein the sealing member is grounded.
公开/授权文献
- US20220139756A1 TRANSFER HAND AND SUBSTRATE PROCESSING APPARATUS 公开/授权日：2022-05-05
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