- 专利标题: Three-dimensional memory device and method of making thereof using double pitch word line formation
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申请号: US17351789申请日: 2021-06-18
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公开(公告)号: US12046285B2公开(公告)日: 2024-07-23
- 发明人: Naoki Takeguchi , Masanori Tsutsumi , Seiji Shimabukuro , Tatsuya Hinoue
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Addison
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Addison
- 代理机构: THE MARBURY LAW GROUP PLLC
- 主分类号: G11C16/04
- IPC分类号: G11C16/04 ; H01L23/522 ; H01L23/528 ; H10B41/10 ; H10B41/27 ; H10B41/35 ; H10B43/10 ; H10B43/27 ; H10B43/35
摘要:
A vertical repetition of multiple instances of a unit layer stack is formed over a substrate. The unit layer stack includes an insulating layer and a sacrificial material layer. Lateral recesses are formed by removing the sacrificial material layers selective to the insulating layers. Each lateral recess is sequentially fill with at least one conductive fill material and an insulating fill material, and vertically-extending portions of the at least one conductive fill material are removed such that a vertical layer stack including a first-type electrically conductive layer, a seamed insulating layer, and a second-type electrically conductive layer are formed in each lateral recess. Memory opening fill structures including a respective vertical stack of memory elements is formed through the insulating layers and the layer stacks. Access points for providing an etchant for removing the sacrificial material layers may be provided by memory openings, contact via cavities or backside trenches.
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