- 专利标题: Impedance match with an elongated RF strap
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申请号: US17795225申请日: 2021-01-12
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公开(公告)号: US12080518B2公开(公告)日: 2024-09-03
- 发明人: Felix Leib Kozakevich , Alexei Marakhtanov , Bing Ji , Ranadeep Bhowmick , John Holland
- 申请人: Lam Research Corporation
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: PENILLA IP, APC
- 国际申请: PCT/US2021/013111 2021.01.12
- 国际公布: WO2021/154492A 2021.08.05
- 进入国家日期: 2022-07-25
- 主分类号: H03H7/38
- IPC分类号: H03H7/38 ; H01J37/32
摘要:
An impedance match is described. The impedance match includes a housing having a bottom portion and a top portion. The bottom portion has match components and the top portion has an elongated body. A low frequency input is connected through the bottom portion of the housing, and the low frequency input is interconnected to a first set of capacitors and inductors. A high frequency input is connected through the bottom portion of the housing, and the high frequency input is interconnected to a second set of capacitors and inductors. An elongated strap extends between the bottom portion and the top portion of the housing. A lower portion of the elongated strap is coupled to the second set of capacitors and inductors and an upper portion of the elongated strap is connected to an RF rod at an end of the elongated body.
公开/授权文献
- US20230081542A1 IMPEDANCE MATCH WITH AN ELONGATED RF STRAP 公开/授权日:2023-03-16
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